硅片搬送机 AL110
Higher Efficiency for Superior Productivity
Response to 300mm Wafer
Free setting of inspectionmodes, and allow the operator to maintain a natural, relaxedposition even during long operation back end
process.
Macro Illumination for exclusive use
OLYMPUS gives you aperfect method to inspect a scratch, dust and ect. Using two types ofllumination ( Scattering /
FocusedIlumination).The combination with metal-Halide Lamp and Fiberenables you to iluminate whole area of 300mm wafer with
a coldlight.
Outstandingsafety and reliability
AL110-12 helpsto inspect 300mm wafer with outstanding safety and reliability.